BiCMOS Embedded RF-MEMS Technologies

This paper presents BiCMOS embedded RF-MEMS switch technologies for two technology lines, the 0.25 micrometer and the 0.13 micrometer SiGe BiCMOS. The developed RF-MEMS switch technologies include Single-Pole Single-Throw (SPST) and Single-Pole Double-Throw (SPDT) switches for mm-wave applications. The technologies offer two different packaging technologies for the RF-MEMS switches, namely Silicon cap packaging and thin film wafer-level encapsulation.