GaN Nanowire MOSFET With Near-Ideal Subthreshold Slope

Wrap-around gate GaN nanowire MOSFETs using Al
₂
O
₃
as gate oxide have been experimentally-demonstrated. The fabricated devices exhibit a minimum subthreshold slope of 60 mV/dec, an average subthreshold slope of 68 mV/dec over three decades of drain current, drain-induced barrier lowering of 27 mV/V, an on-current of 42 μA/μm (normalized by nanowire circumference), on/off ratio over 10
⁸
, an intrinsic transconductance of 27.8 μS/μm, for a switching efficiency figure of merit, Q = gm/SS of 0.41 μS/μm-dec/mV. These performance metrics make GaN nanowire MOSFETs a promising candidate for emerging low-power applications, such as sensors and RF for the Internet of Things.