Moving coil type wireless linear motor based on magnetic resonance coupling

Semiconductor and LCD manufacturing equipment, which needs to position the stage in high-speed and high-precision, has been developed on both the mechanism and control. The experimental results, however, is often different from theoretical results because of a cable disturbance caused by such power cables and communication lines. Therefore, in order to eliminate the high-voltage cable disturbance, this paper proposes a next generation high-precision stage with lightweight moving coil type linear motor powered by wireless power transfer via magnetic resonance coupling. The experimental results demonstrate effectiveness of the proposed high-precision stage.