Influence of high-temperature annealing on physical and mechanical properties of Nb-Si-N coating

In the work structural changes occurring in the coatings of Nb-Si-N as a result of a change in the stress on the substrate and high temperature annealing in a vacuum and without a vacuum environment were described. The conditions for the transition from the tetragonal to the cubic phase of the niobium nitride as a result of the deviation of the concentration of nitrogen from the stoichiometric equilibrium were revealed. Positive effect of the transition from nanocrystalline to nanocomposite structure as a means of improving the thermal stability of the coating is shown.