Response surface modeling for parasitic extraction for multi-objective optimization of multi-chip power modules (MCPMs)

In our tool, PowerSynth, fast calculation of electrical parasitics is of paramount concern when evaluating the layout of an MCPM during multi-objective optimization. To this end, this work extends the current capabilities of PowerSynth to quickly and more accurately extract lumped RLC parameters by utilizing a response surface model. An MCPM is represented as a series of layers forming a stack corresponding to their physical dimensions and material properties. FastHenry is employed to run frequency sweep simulations on this layer stack with both rectangular traces and 90-degree corners with varying sizes, spacing, and positioning. The results of these simulations are then used to build a response surface model accounting for frequency dependence and current crowding effects. This model is then used in the MCPM optimization engine to evaluate loop parasitics for a given layout. The results of this model are then compared with FastHenry simulations and measurements using an LCR meter and Time Domain Reflectometry (TDR) of a fabricated prototype.