Remote micro/nanomanipulation for factory automation

We show how our ongoing work on remote controlled micro/nano-manipulation can be useful for the development of miniature, integrated manufacturing for IC development. The basic components for such a system have already been developed and are available. The advantages are reduced clean room volume, reduced dead-volume and exposed area and hence reduced losses of ultra-pure gases, low friction and low energy consumption and easy control of the whole system while complete remote control and monitoring allows environments unsuitable to human life.