ELS2: extended life source with dual cathode

The Extended Life Source (ELS) is currently being used to obtain sufficient beam current and lifetime for the usual well formation implantation. The process of modern well formation requires higher beam current and longer life-time for the highly-charged state operation in high energy implanters. The ELS2, the 2nd generation of the ELS, is developed to meet these requirements, featuring the dual cathode configuration with carefully designed thermal insulation and thicker cathodes. With the ELS2, a much higher current of the p/sup +++/ beam is obtained and double the lifetime is observed, compared to the original ELS. Operability of the ELS2 is exactly as same as the ELS and maintainability is considered to be easier.