PZT lateral bimorph array stator based ultrasonic micromotor

An ultrasonic motor is demonstrated that utilizes novel X-motion PZT bimorphs to drive the rotor. Laser manufactured piezoelectric actuators are demonstrated that produce bimorph tip motion from top-left to bottom-right, and from top-right to bottom-left in the shapes of the letter X. This is achieved by applying voltage amplitudes and phases to produce stresses that lead to both in-plane and out-of-plane motion of bimorphs. An analytical and numerical model of the displacement and electrical impedance of the actuator are confirmed by experimental data. An array the actuators is used to demonstrate motor rotation to from 100-500rpm at frequencies of 10-60kHz, with actuation voltages of 10-120V_pp actuation.