Flexible thermistors for far infrared detection: MCNO films with low resistivity and high TCR deposited on flexible organic sheets

MCNO flexible thermistors have been fabricated on polyethylene terephthalate or polyimide sheets by RF magnetron sputtering method at room temperature. The whole fabricating processes have been done at room temperature. The temperature coefficient of resistance is -3.1% and resistivity as low as 110Ωcm at 295K. Due to the heat-treat free process, high TCR and moderate resistivity features, the technique we provide here allows a convenient and low cost industrial manufacture of high performance flexible thermistors and wide band infrared detectors.