Nonlinear cross-coupling of a 2-DOF piezoelectric actuator with multi-channel Hammerstein model

Commercial piezoelectric actuated stages usually has been decoupling designed from the mechanical structure. This paper develops a piezoelectric actuated stage (P-563.3CD) experiment platform. Observed cross-coupling effect in the piezo-stage is below 1%. In order to improve the performance of piezo-stage in a further step, a multi-channel Hammerstein model is developed to describe the cross-coupling nonlinearity. Further more, the position voltage is introduced into Hammerstein model to modify the performance of the proposed approach. To the end, verification experiments are exhibited.