Reliability Study of Ferroelectric Al:HfO2 Thin Films for DRAM and NAND Applications

Ferroelectric (FE) hafnium oxide is a promising candidate for memory applications. In this paper, endurance, imprint, and retention tests are carried out on FE aluminum-doped hafnium oxide thin films with different electrodes: 1) metal–insulator–metal (MIM) and 2) silicon–insulator–silicon(SIS). MIM devices exhibit higher endurance than SIS devices. However, SIS devices show superior imprint and retention, with an extrapolated retention time-to-failure larger than 10 years at 85 °C. These results are very promising to integrate FE-HfO
₂
in 3-D structures, either for dynamic random access memory or for NAND applications.