MEMS aerodynamic control surfaces for millimeter-scale rockets

This work describes the design, fabrication, and assembly of a MEMS aerodynamic control surface for use in millimeter-scale rockets and other miniature aerial vehicles (MAVs). Aerial vehicles of this scale require very small and light control surfaces to operate effectively. We designed MEMS aero-dynamic control surfaces using electrostatic inchworm motors and planar silicon pin-joints. These were fabricated in a silicon-on-insulator (SOI) process. The fully assembled fin structure demonstrated maximum torque outputs of 1.6 μNm which is enough to maintain an aerodynamic lift force of 1.4 mN.