A micromechanical gyroscope with bistable suspension of microdrive

In this paper, we present the development and analysis of a bistable suspension system of a micromechanical actuator. The efficiency of such an actuator and the feasibility of the concept are assessed experimentally. The improvement of the comb-like micromechanical actuator enables the reduction of a driving potential amplitude of a vibration structure gyroscope. Thus the electrical noise can be reduced.