The deformable valve pump (DVP)

We present a device for fluid handling which utilizes a novel concept for a reciprocating micropump, employing our high stroke buckling piezo-membrane-actuator. Previously we have reported on the valving functionality of the device at 70 kPa of counter pressure. Here, the novel pumping concept of the device is explained. The fabrication methods are described and experimental results are presented. Given its small size, our pump demonstrates an unusually high flowrate of 18.8 ml/min at 27 Hz actuation frequency. One actuator can also drive flow in two pump chambers resulting in up to 25 ml/min of flowrate at only 20 Hz, which demonstrates much higher power efficiency than comparable reported micropumps in the literature.