A MXene based all-solid-state microsupercapacitor with 3D interdigital electrode

Here we report a high capacitance all-solid-state micro supercapacitor (MSC) based on thick interdigital electrodes of 2D Transition Metal Carbides (MXene). Ti₃C₂T_x, one type of MXene, features high pseudocapacity, great conductivity and cyclability. By MEMS technologies, the 300 μm thick interdigital fingers composed of Ti₃C₂T_x and polymer electrolyte (PE) acts as the electrodes of a MSC, which can provide a large mass loading. The high performance electrode material and thick electrode structure contribute to the MSCwith the high specific capacitance of 276 mF/cm² and 95% capacitance retention after 1000 cycles. Moreover, the fabrication is compatible with microfabrication technologies and the devices have the potential for the integration with other electronic devices on a chip.