Design and characterization of microresonators simultaneously exhibiting 1/2 subharmonic and 2:1 internal resonances

We are reporting the design and experimental investigation on a microresonator simultaneously exhibiting nonlinear modal interactions due to 1/2 subharmonic resonance and 2:1 internal resonance. This has been made possible through careful design of the structure with attention to the limits of microfabricated devices. Finite element models of the structure were built and used to layout the device with two desired vibrational modes with a ~2:1 frequency ratio. The microresonator was fabricated in MEMS Integrated Design for Inertial Sensors (MIDIS) from Teledyne DALSA Semiconductor Inc. (TDSI). Extensive experiments were conducted to verify the intended nonlinear responses. The device design methodologies can be employed to fabricate various sensors, including nonlinear gyroscopes incorporating 2:1 internal resonance.