A precision air floating table with the miniature holes with loop channels type

In this study, we developed the precision air floating table using the miniature holes within the loop channels type. The performances of the precision air floating table were investigated, involving the floating height and the stability of the glass substrate and establishing the characteristics of the air floating table in terms of platform parameters (e.g., intake diameter, input air pressure, number of intakes and air flow rate etc.). As the results, the height of the air floating table increases by applying the larger air pressure, fabricating the bigger diameter of the intake, or using the larger number of intakes. The range of height of floating table was 7μm to 331μm by our controlling with arriving steady state using about 12 ms to 17 ms. However, the and advantage air floating table method provides the precisely control, quickly response time and working on the smaller amount of air via the miniature holes with loop channels type.