Low actuation voltage RF MEMS Shunt Capacitive Switch based on rotated serpentine spring

RF MEMS switches are extensively used in radars, satellite, wireless systems, communication systems and switch matrices in order to achieve low power consumed, high isolation and be fabricated in small size and weight. This Paper reports a low actuation voltage Capacitive Shunt RF MEMS Switch with two flexures based on rotated serpentine spring concept. The switch is designed on a CPW line with an impedance of 50Ω. The dielectric that is used is silicon nitrate with thickness of 0.1um. Actuation voltage of 5.8V and high capacitive ratio is achieved. RF analysis is performed in MATLAB. The results show that the return loss is −0.24 at 13GHz and the isolation is −49dB at 13GHz.