Process tool uptime improvement through reduction in subfab exhaust abatement unit faults

A modified point-of-use gas abatement unit was evaluated to reduce the rate of abatement unit faults due to process by-product build-up and unit blockage. Fifteen units were modified during the evaluation. During the evaluation, the rate of abatement faults decreased by 80% and have eliminated over 400 hours of yearly unplanned downtime. Furthermore, the modifications have reduced the cost of consumables and cost of ownership for the point-of-use gas abatement units as well.