Design and simulation of MEMS based sensor for early detection of PD

In this paper, we have proposed a novel structure in Micro Level to detect Parkinson's Disease at early stage. We have designed the proposed structure using FEM tool i.e Comsol Multi-Physics by utilizing capacitive actuation technique. The Simulations are done on capacitive based micro structure by changing the proof mass of the material. It is observed that PTFE material of the proof mass with silicon legs by giving specific dimensions are showing best optimized results. This results shows high sensitivity, high reliability and cost effectiveness of the proposed PD Sensor.