Determination of E, CTE of thin films from curvature measurement

The prediction of cracking risk in BEoL stacks requires knowledge of at least elastic properties of materials (E/CTE). Their determination by direct measurements (TMA, DMA, Nanoindentation) is not always possible due to difficulties in preparation and handling of samples, containing ultra-thin films. Curvature measurements can be conducted with much less effort. But there is a fundamental problem: curvature depends on the product of both parameters. Method for their individual determination is an objective of this work. Developed method can be useful for cases, where direct determination of E/CTE is not possible.