Radiation induced leakage currents in dense and porous low-k dielectrics

We investigate leakage currents in a-SiOC:H thin films with electrically detected magnetic resonance (EDMR) and new zero field magnetoresistance measurements. We substantially change leakage currents by subjecting the dielectrics to ⁶⁰Co gamma irradiation. Our results strongly suggest the potential of a very simple measurement, near zero field magnetoresistance, as a reliability physics tool in the investigation of transport mechanisms in these materials.