A novel, flexible pcell-driven design flow for mm-wave on-chip passives

On-chip EM modeling at mm-wave frequencies requires design methods that incorporate the layout and verification macros of IC EDA tools with parameterized EM CAD. We propose a novel, flexible design flow for 3D EM modeling of BEOL structures that allows for parameterized design of BEOL structures using Pcell elements as seed, thereby reducing the time required to generate the full simulation model in EM CAD. The method is illustrated by the co-design of a 94 GHz directional coupler.