Improved Multi-Cusp Ion Source to Efficiently Extract B+ Beam and PHx+ Beam

For Nissin ion doping system referred to as iG series, we developed a new mechanism which could adjust the position of the filament inside the plasma chamber without breaking high vacuum. The filament position is one of the important factors in beam extraction efficiency. The suitable filament position for B
⁺
and PH
_x
⁺
beam is different. By using this mechanism, when the filament position is optimized for each of B
⁺
and PH
_x
⁺
beam, we can extract efficiently both of B
⁺
and PH
_x
⁺
beam. For example, we decrease arc current by 40% to obtain the same PH
_x
⁺
beam current.