Uncooled microbolometer arrays

The basic theoretical and practical provisions necessary for the development of high-quality solid-state uncooled microbolometer arrays detectors of infrared radiation in this article. The state and prospects of development of microbolometer arrays on MEMS technology. The information about the microbolometer arrays developed by MEMS technology. The comparative characteristic arrays receivers of foreign production. The paper shows the application of a new type of high-speed multi-element thermal sensors based on VOx films with internal memory mode to monitor energy parameters of laser radiation. This development is in the process of the mosaic arrangement of heat detector on the receiving receiver site. The thickness of the heat-sensitive layer on the basis of VOx film was 60 nm as an dielectric substrate, a mica ST-1 40 micron thick. When using the minimum number of measurement channels get an acceptable picture of the laser image.