Heating dynamic of plasma components in resonator of microwave hydrogen ion source

Description of microwave discharge plasma electrons and ions heating occur with using conclusions of trajectory model. Presents equations describing changes of plasma components temperature, whose energy distribution function is similar to Maxwell. For compile these equations used kinetic scheme, considering processes of elastic scattering, dissociation and ionization of hydrogen atoms and molecules. From the cited data follows, that with increasing plasma degree of ionization occurs fast growth of average electrons and ions energy. This results to decreasing ionization rate and as a consequence to decreasing of energy efficiency of the ion source.