Realization of triboelectric energy harvesters using steel-polymer microfabrication methods

Triboelectric nanogenerators (TENG) are developed for wireless and batteryless keyboard applications, using steel-polymer microfabrication methods including lithography, electrochemical etching, hot embossing and thermo-compression bonding. Microfabricated steel electrode and polymer film (polyethylene naphthalate (PEN)) are used for the first time to implement a TENG of conductor-to-dielectric contact-mode type. Crab leg shaped design is applied on 50 μm thick steel film to harvest energy. Triboelectric effect between polydimethylsiloxane (PDMS) and steel surfaces is characterized. Maximum instantenous power density of 6 is achieved for 1 mm displacement of 1 Hz motion. Triboelectric surface charge density between steel and PDMS surface is found as 3.2 μc/m2.