Reliable field emission array for X-ray generation with inorganic filler treated by high temperature vacuum annealing

We design, model, optimize and fabricate cold electron cathodes that are specifically designed for X-ray sources. Micromachining patterning process, which enhanced edge effect, significantly improved its emission performance. High bonding strength was achieved by a preferred high temperature annealing process, which results in the improvement of field emission properties. To check its practical application, the fabricated emitter was vacuum sealed and tested in a conventional X-ray tube.