Properties of Bi-Sr-Ca-Cu-O (2212) films deposited by sputtering on tilted substrates

Bi-Sr-Ca-Cu-O (2212) thin films have been deposited on tilted SrTiO/sub 3/ substrates using a dc sputtering system. These films have been deposited at 710-790/spl deg/C. The thickness of these films is about 170 nm. The films deposited at 730, 750 and 770/spl deg/C exhibit superconductivity, and the highest value of critical temperature is about 70 K for the film deposited at 750/spl deg/C. The crystal structure of this film has also been investigated by X-ray diffraction with c-axis oriented 2212 phase.