On-chip terahertz electronics: From device-electromagnetic integration to energy-efficient, large-scale microsystems

This paper summarizes our approaches which synthesize the optimum electromagnetic (EM)-wave environment around various silicon devices, in order to maximize the device efficiency with minimum passive loss and footprint. This has enabled multi-mW THz radiation in standard silicon processes. Various critical capabilities for future THz microsystems, including integrated phase locking, multi-pixel coherent imaging, and an ultra-broadband inter-chip waveguide link, are also demonstrated.