A novel 2D piezo-nanopositioning stage based on triangle amplifier mechanism

Due to their high resolution and positioning accuracy, piezo-nanoposititioning stages are widely used in precision and ultra-precision fields. A nano-positioning platform with large travel range and bidirectional symmetrical output characteristic is proposed. Theoretical static model develops the relationships among output force, displacement, static stiffness and the structure parameters of the platform. Static analysis of the platform is carried out by ANSYS workbench. Finally, the theoretical and the finite element models are confirmed by experiments. The experimental results of the prototype show that the output performances in X and Y direction are similar and both of them are within an 8% deviation from the theoretical value. The stroke of the stage reaches to 41.6μm and 42.9μm in X and Y directions respectively and is directly proportional to the amplitude of the input sinusoidal voltage of 10Hz. The minimum output displacement step is 50nm. The nano-positioning stage designed is featured with bidirectional symmetrical output characteristic and millisecond starting characteristic, with high positioning precision.