3D energy harvester with tunable resonant frequency

This paper describes the design and function upgrade of 3D electrostatic energy harvester. The structure consisting of simple finger layout works on the principle of an electrostatic converter and converts a non-electric energy into electrical energy by periodical modification of the gap between the electrodes. The mechanical structure is modeled as a 3D silicon-based MEMS. The basic structure reaches a low resonant frequency of 100 Hz. Add-on circuit makes it possible to tune the resonant frequency to the desired value to be able to resonate with the ambient mechanical vibrations. This makes the energy harvesting process more efficient.