Method for the process control of integrated circuits production to account the influence of uncontrolled parameters

In this paper, a method of taking into account various uncontrolled parameters, emerging during the technological process of producing of integrated circuits chips is developed. The basis of this method is adjusting (correction) of the existing equipment settings to increase the number of yield product. The adjustment is performed by changing the influencing impacts from the control system so that to compensate the effect of non-random external influences by changing the technological parameters of in concrete manufacturing operations in the production of new batches. An example for the oxidation step is presented.