Temperature controlled oven for low noise measurement systems

Low frequency noise measurements are often applied to the characterization of electron devices. When such measurements have to be performed on electronic components maintained at a given temperature, the thermal stability of the oven used to this purpose becomes a major concern. In this paper we present the realization of a high thermal stability oven, purposely designed for low frequency noise measurement devoted to the characterization of electromigration in metal interconnections of integrated circuits. The prototype demonstrates that the contribution of the thermal fluctuations of the oven to the background noise of the measurement system is negligible down to frequencies as low as 10 mHz in the temperature range 25-150/spl deg/C.