Flexible magnetic field sensors with ultra-thin silicon interposer

For performance improvement of electromagnetic actuators an increasing amount of sensors providing real-time feedback of measureable system variables is needed. In industrial components usually several signals have to be detected or even controlled. Therefore numerous data are to be analyzed in a wide range of characteristics. To meet specific system requirements, e. g. weight and size, the sensors have to be fabricated in small light-weight structures featuring total heights below 150 µm. These designs also ensure saving rare materials for complex electronic applications, which is essential for actual challenges regarding preventive environmental protection and resources economics.