1 × 64 Nb5N6 microbolometer array detector for real time THz imaging

We present an antenna-coupled 1 × 64 Nb5N6 microbolometer array detectors for real-time terahertz (THz) imaging. The intrinsic average responsivity of the detectors in the array is 650 V/W, and the corresponding noise equivalent power (NEP) is 17 pW/√Hz. The array chip is combined with a low noise readout circuit with 64 channels. The array detector was preliminary used for THz source imaging, and the images obtained by the array chip at 0.22 THz and 0.65 THz. The experimental results indicate that an optimally designed Nb5N6 microbolometer array detector will be an efficient, fast, and inexpensive detector for THz imaging systems.