Design and analysis of a single-structure three-axis MEMS gyroscope with improved coupling spring

This paper reports the design and analysis of a single drive mass three axis Microelectromechanical systems (MEMS) gyroscope. The proposed MEMS gyroscope contains a unique and simple coupling spring to couple the driving masses. Due to the use of this coupling spring, the stress effect on the spring ends is reduced as it is attached at two points with the driving mass. Moreover, the unwanted motions of the driving mass can be suppressed due to the use of the two spring beams for the support of the central spring. After FEA simulation using COMSOL Multiphysics tool, a first driving mode of the proposed design has been achieved. Other modes were achieved for the pitch, roll and yaw sensing parts. The simulated resonant frequencies are 15.20 kHz for the driving mode, 15.21 kHz for the pitch sensing mode, 15.32 kHz for the roll sensing mode and 15.59 kHz for the yaw sensing mode, respectively.