Design and simulation of PZT based MEMS piezoelectric accelerometer

Micro-electro-mechanical system (MEMS) based accelerometer is designed and simulated which works on the principal of piezoelectric effect. The piezoelectric material used in the accelerometer experiences a force proportional to the acceleration which causes deformation of piezoelectric material & hence separation of electric charges on either side of the piezoelectric crystal. The chargesdeveloped on either side of the piezoelectric crystal are tapped using top and bottom electrode, hence the voltage is developed across the piezoelectric layer. The volatge is proportional to the acceleration. Piezoelectric material used here is lead zirconate titanate (PZT). This has the advantages of better sensitivity, accuracy, durability, ease of installation, large dynamic range, high frequency response and long life span. Design & simulation of proposed model is carried out with the help of CoventorWare 2010. The mathematical model of the proposed accelerometer is verified with the simulated results.