Mode-order-invariant beam splitter on silicon-on-insulator waveguide

We present a mode splitter which is able to split the TE0&TE1 modes without changing the mode order. High coupling efficiency (>-2 dB), low insertion loss (<-0.1 dB) and good fabrication tolerance (−40 nm<Δw<70 nm) can be obtained over a wide bandwidth of 150 nm.