High-Q photonic crystal nanobeam cavities on silicon

Photonic crystal (PhC) nanobeam cavities have attracted increasing attention owing to the advantages of high Q-factor, small mode volume and no limitation of FSR. Various PhC cavities have been developed for optical communications, optical sensors, optomechanics, etc.. We investigate the design, fabrication, and experimental characterization of high quality factor PhCnanobeam cavities on silicon. The results show that PhCnanobeam cavities have the potential to ful?ll the aforementioned requirements and form a building block for achieving on-chip optical filtering and sensing applications.