Precision measurement of dielectric properties for thick ceramic film on a ceramic substrate using the TE011 split-circular cavity resonator at 10GHz band by applying mode-matching method

In this study, the mode-matching method was applied to formulate an analytical model for a split cylindrical cavity resonator with a thick ceramic film layer sandwiched between two-layer alumina substrates. Next, resonant frequencies with the TE₀₁₁ mode were computed with an eigenvalue problem approach using the model formula. The Q value of the resonator was also calculated by applying the perturbation method to the analytical model. The validity of the proposed analytical technique was confirmed using the procedure described below by applying this method to the estimation of complex permittivity for thick film with an inverse problem approach. The complex permittivity of 2-μm-thick ceramic thick films was estimated in the TE₀₁₁ mode using a split cylindrical cavity resonator synthesized by the chemical solution method onto a 200-μm thick, 50-mm-diameter alumina substrate. It was confirmed that the estimated results for relative permittivity and the tan d values of these ceramic thick films were affected by the estimated relative permittivity value of the alumina substrate.