A digital compensation method for piezoresistive pressure sensor

The pressure sensor currently used in domestic rail transport industry has a poor compatibility with its media, causing a large temperature drift. Such a sensor usually fails to meet the application requirements of diesel locomotive measuring environment with multiple media and small volume. In order to meet the requirements of the diesel locomotive, this paper conducts a deep analysis on the piezoresistive effect, piezoresistive coefficients, and operating principle of the pressure sensor based on the structural property of conventional silicon piezoresistive pressure sensor. With the analysis, a signal conditioning circuit based on programmable chip ZSC31010 is designed and a method to achieve the temperature compensation and nonlinear compensation is proposed based on the temperature characteristic of the pressure-sensitive element.