Vibration study on Surface Acoustic Wave for particle manipulation

Acoustic manipulation has been widely studied and applied in many research and industry fields. Recently Surface Acoustic Wave (SAW) technology, because of its energy concentration and easy integration, has become more and more popular in microfluidics. In this paper, we fabricated our SAW chips and setup a SAW-based acoustic manipulation system. To study the vibration of the SAW chip, the frequency spectrum analysis was carried out using a Network Analyzer and the vibration of the crystal wafer surface was tested through a Doppler Displacement Meter. Finally, particles focusing were realized in the microfluidic channel of our SAW chips, and the particles' motion trajectory under Standing Surface Acoustic Wave (SSAW) was analyzed through Particle Image Velocimetry (PIV).