Analytical modeling and sensitivity analysis of clamped edge circular diaphragm based on capacitive pressure sensing method

In this paper we proposed a capacitive pressure sensor with clamped edge diaphragm. For the measurement of results we use here inductively coupled tank circuit. The analytical solution we proposed is based on small plate deflection theory and tank circuit. And solution based simulation are attained from analytical results. From simulation results it is found that both the results are match with each other. For analytical results we did mathematical formulation in this paper. The range of the pressure used in this paper is in millibar. The range from 20mbar to 2000mbar is used which is best suited for avionic application. In this paper we also work on the sensitivity of capacitive pressure sensor that is one of the important parameter of any sensor. All the simulation for analytical model in this paper is done with the help of MATLAB and SolidWorks.