Experimental and theoretical investigations of microminiature thermionic vacuum tube devices

Details on the fabrication and testing of microminiature thermionic vacuum tube devices (i.e., diodes, triodes) with ultra-small (i.e., micron-scale) dimensions will be presented. The micro-miniature thermionic vacuum (MTV) devices can either have a direct or indirect heated cathode with a suspended filament supplying the thermal energy. Single device element architecture can consist of either a totally vertical structure or a combination of planar and vertical structures.