A programmable CMOS feedback IC for reconfigurable MEMS-referenced oscillators

MEMS resonators integrated with CMOS feedback networks have a potentially wide field of applications as oscillator circuits in communications and sensor systems. However, considerable advancements to this nascent technology are required to realize such a vision. We present a configurable CMOS chip which facilitates the development of MEMS-referenced oscillators, especially for timing and sensing applications in harsh environments. The chip has been designed in the OnSemi 3M2P 0.5 μm process. It supports MEMS resonators with various frequencies (10-120 kHz), resonant modes, and impedance levels, thus allowing interfacing to a wide range of devices. This paper describes analysis, design, and simulation results.