Performance degradation model of roots pump in vacuum system based on leakage of rotor wear

As an important component of the vacuum system, the performance of Roots Pump affects the reliability of the system. This paper selects the rotor wear fault mode as the research object, based on the establishment of Roots Pump's basic model, through the analysis on the failure mechanism, models the leakage, and finally establishes the Roots Pump's performance degradation model of leakage caused by rotor wear. Combined with the actual conditions, by using MATLAB and ANSYS to do the verified simulation, this paper tests the validity, accuracy and precision of the model, gets the degradation curve of Roots Pump's performance and predicts the start time and the failure time of the Roots Pump's performance degradation. This paper provides the theoretical basis for the maintenance and repair of the Roots Pump in the vacuum system.