Evaluation of verification devices with precise probe measurement system in NMIJ

The paper discusses about evaluation of verification devices in on-wafer measurement. To eliminate effect of probe positioning repeatability, an automatic controlled probing system and a position-adjustment system were established. The established systems can reduce operator-derived probe positional errors. Consequently, the verification devices were evaluated with lower uncertainty owing to the systems. It was found that each of the devices exhibited different errors due to different characteristics of device.