High quality MEMS inductors for chipless RFID in harsh environment

Quality factor of the conductive patches determine the read range and the number of uniquely encoded tags in chipless radio frequency identification (RFID) technologies. Radar cross section (RCS) of the conductive patches is typically used to evaluate the tag performance metrics including read range and number of bits. In this paper we have shown that the RCS can be significantly increased by using three dimensional microstructures instead of planar conductive patches. CST simulation results show a 20dB increase in RCS of 3-dimensional (3D) coils compared with planar coils.