A 60GHz slot antenna based on MEMS bulk micromaching technology

In this paper, we proposed a slot antenna with three layers ultrathin silicon substrate based on MEMS bulk micromaching technology at 60GHz millimeter wave band. The substrate-integrated waveguide (SIW) is used as the feeding structure. The resonant cavity of the proposed antenna is filled with air instead of silicon, so the antenna achieves the low loss and broadband property. A slot structure is loaded above the resonant cavity as the radiation aperture. The numerical results are utilized to prove the antenna design strategy which shows the proposed has a bandwidth from 58.2 GHz to 64.4 GHz and a gain of up to 9.3 dBi in this band.